Characteristics of microwave type ion source.
نویسندگان
چکیده
منابع مشابه
Development of a microwave ion source for ion implantations.
A microwave ion source is expected to have a long lifetime, as it has fewer consumables. Thus, we are in the process of developing a microwave ion source for ion implantation applications. In this paper, we report on a newly developed plasma chamber and the extracted P(+) beam currents. The volume of the plasma chamber is optimized by varying the length of a boron nitride block installed within...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1991
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.34.229